Title :
Modelling and design of MEMS for RF and millimeter wave applications
Author :
Dubuc, D. ; Rabbia, L. ; Saadaoui, M. ; Flourens, E. ; Ducarouge, B. ; Aissi, M. ; Boughriha, F. ; Grenier, K. ; Pons, P. ; Graffeuil, J. ; Plana, R.
Author_Institution :
Lab. d´´Autom. et d´´Anal. des Syst., CNRS, Toulouse, France
Abstract :
This paper investigates the design methods which can be used to predict MEMS behavior with high accuracy. We presents EM methods, mechanical and thermal methods, and finally the electrothermal concept.
Keywords :
electromagnetic field theory; micromechanical devices; microwave devices; millimetre wave devices; semiconductor device models; thermal analysis; EM methods; MEMS design; MEMS modelling; RF MEMS; electrothermal concept; mechanical methods; millimeter wave MEMS; thermal methods; Biomembranes; Electromagnetic modeling; Electrostatics; Finite difference methods; Micromechanical devices; Millimeter wave technology; Radio frequency; Radiofrequency microelectromechanical systems; Springs; Switches;
Conference_Titel :
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Print_ISBN :
0-7803-7440-1
DOI :
10.1109/SMICND.2002.1105791
