DocumentCode :
3852316
Title :
A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge
Author :
Frank M. Yaul;Vladimir Bulovic;Jeffrey H. Lang
Author_Institution :
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology , Cambridge, MA, USA
Volume :
21
Issue :
4
fYear :
2012
Firstpage :
897
Lastpage :
907
Abstract :
This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and surface waves. The sensors exhibit a 0.0014 fractional resistance change per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement has a repeatability of 22% of the peak amplitude of the pressure waveform, due to creep. Additionally, sensor operation while bent to a 0.5-m radius of curvature is demonstrated. Each sensor consists of a strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon-black-PDMS composite. A 1-D array of four sensors with a 15-mm center-to-center spacing is fabricated, and the dynamic response of the sensors is characterized and modeled.
Keywords :
"Arrays","Strain","Cavity resonators","Electrical resistance measurement","Resistance","Silicon"
Journal_Title :
Journal of Microelectromechanical Systems
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2190714
Filename :
6177640
Link To Document :
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