DocumentCode
3855033
Title
Innovations
Volume
22
Issue
4
fYear
1985
Firstpage
24
Lastpage
25
Keywords
"X-ray imaging","Metals","Resists","Ceramics","Microscopy","Random access memory"
Journal_Title
IEEE Spectrum
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1985.6370613
Filename
6370613
Link To Document