A silicon micromachined pin for contact droplet printing

Author

Tsai, Jane ; Kim, Chang Jin CJ

Author_Institution

Biomed. Eng. Inter-Departmental Program, California Univ., Los Angeles, CA, USA

Volume

2

fYear

2002

fDate

2002

Firstpage

1632

Abstract

We report the design and fabrication of a micromachined silicon pin that serves as a contact-printing device. The pins have potential application in the DNA microarray field for small and precise droplet printing onto a solid support. Our goal is to provide an economic solution for better accuracy and repeatability for such applications as DNA and protein printing by using MEMS technology. The test results showed an average droplet size of 16 μm in diameter, compared with over 100 μm for the commercial pins, as well as more consistent droplet sizes.

Keywords

DNA; arrays; biomedical electronics; micromachining; micromechanical devices; proteins; 16 micron; DNA microarray; DNA printing; DRIE; MEMS technology; Si; accuracy; capillary action; contact droplet printing; deep reactive-ion-etching; fabrication; protein printing; repeatability; silicon micromachined pin; solid support; surface tension; DNA; Design engineering; Fabrication; Micromechanical devices; Pins; Printing; Proteins; Silicon; Solids; Surface tension;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference, 2002. Proceedings of the Second Joint

ISSN

1094-687X

Print_ISBN

0-7803-7612-9

Type

conf

DOI

10.1109/IEMBS.2002.1106574

Filename

1106574