Title :
PolyDiMethylSiloxane nanostructures fabrication by FIB machining for single molecular studies applications
Author :
Leclerc, Eric ; Mita, Yoshio ; Fujii, Tenuo
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Japan
Abstract :
Nanotower structures were fabricated in PDMS (PolyDiMethylSiloxane) as a platform for molecular patterning. By FIB machining, the work shows the possibility of this material to reach nanometer scales.
Keywords :
biological techniques; focused ion beam technology; micromachining; molecular biophysics; nanotechnology; 0.25 micron; 0.5 micron; FIB machining; PolyDiMethylSiloxane nanostructures fabrication; focused ion beam machine; lab-on-chip; molecular patterning; nanotowers; single molecular studies; single molecule immobilizations; Etching; Fabrication; Ion beams; Machining; Nanobioscience; Nanoscale devices; Nanostructures; Poles and towers; Proteins; Silicon;
Conference_Titel :
Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference, 2002. Proceedings of the Second Joint
Print_ISBN :
0-7803-7612-9
DOI :
10.1109/IEMBS.2002.1106575
