Microspectrometer for infrared analysis of gases and biological fluids

A microspectrometer for operation in the infrared range has been designed and fabricated. The principal component of the micro-spectrometer is a Fabry-Perot interferometer (FPI), which can be used to select the resonant frequency through electrostatic actuation of the mirrors. An infrared emitter is used as the source, and integrated with the FPI and the microchannel to complete the spectrometer. The device has been designed using finite element modeling to determine the stress distribution on the silicon nitride membrane due to deflection and the voltage required for the displacement of the membrane has been found to be less than a volt. The devices have been fabricated using bulk and surface microfabrication techniques. Optical characterization has been done with an FTIR spectrometer. Initial results presented here support the feasibility of the approach in developing standalone microspectrometers for analysis of aqueous samples including biological fluids as well as gases in environmental applications, which may include bio-warfare agents.