Title :
Eddy Current Damping Suppression of Air-Core Monopole Linear Motor for Nanopositioning System
Author :
Pan Donghua ; Li Liyi ; Chen Qiming ; Wang Tiecheng ; Peng, E.
Author_Institution :
Harbin Inst. of Technol., Harbin, China
Abstract :
In the nanopositioning system, a damping force is generated by eddy current in the cooling plate and it is a disturbing force for this system. In this paper, a new method is introduced to suppress eddy current by offsetting back EMF. In order to offset back EMF, several slits have been incorporated in the cooling plate, which can help with regulating the series order in every region. Based on the electromagnetic theory, the analytical model of new cooling plate is established. The analytical model and eddy current suppression effect of the new cooling plate are proven by experiment: 17% reduction in the damping force significantly help with reducing the thrust fluctuation, with less than 4% analytical error.
Keywords :
cooling; damping; eddy currents; electric potential; linear motors; nanofabrication; nanopositioning; air-core monopole linear motor; cooling plate; damping force reduction; disturbing force; eddy current damping suppression; nanopositioning system; offset back EMF; Analytical models; Cooling; Damping; Eddy currents; Force; Magnetomechanical effects; Metals; Air-core linear motor; analytical model; damping force; eddy current;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2013.2241739