Title :
Free-space optical cross connect switch based on a 3D MEMS mirror array
Author :
Uenishi, Yuji ; Yamaguchi, Joji ; Amamoto, Tsuyoshi Y. ; Takeuchi, Nobuyuki ; Shimizu, Akira ; Higurashi, Eiji ; Sawada, Renshi
Author_Institution :
NTT Microsystem Integration Labs., Kanagawa, Japan
Abstract :
The design and characteristics of a 3D MEMS mirror array and a compact optical fiber array as well as the free-space optical cross connect (OXC) switch module comprising them are presented.
Keywords :
micro-optics; microswitches; mirrors; modules; optical communication equipment; optical design techniques; optical interconnections; optical switches; wavelength division multiplexing; 3D MEMS mirror array; compact optical fiber array; free-space optical cross connect switch; free-space optical cross connect switch module; Electrodes; Micromechanical devices; Mirrors; Optical arrays; Optical collimators; Optical fibers; Optical polymers; Optical switches; Silicon; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1133917
