Creation of web-based interactive virtual experiments on microelectronics for early engineering students

One of the greatest challenges to attracting and retaining early engineering students is the lack of "hands-on" experiences early in the university curriculum. This paper describes a project aimed at introducing early university students to the high-tech field of microelectronics through the use of web-based "virtual experiments". The website allows for exploration of microelectronics at levels ranging from underlying science, device physics, processes and processing tools. New pages even recreate the layout and operation of an actual microelectronics factory site. Virtual reality is also used to support a real university lab in which a student can fabricate actual devices in a few short lab sessions. The web material is presented in an intuitive and highly visual 3D form that is accessible to a diverse group of students. It has already been tested with high school science students, engineering students, and graduate business students. This paper describes the modules developed as well as the tools used.