Membrane-based photonic crystal light sources

Author

Viktorovitch, P. ; Monat, Christelle ; Seassal, Christian ; Letartre, Xavier ; Regreny, P. ; Rojo-Romeo, P. ; Cassagne, D. ; Albert, J.P.

Author_Institution

LEOM, Ecole Centrale de Lyon, Ecully, France

Volume

2

fYear

2002

fDate

10-14 Nov. 2002

Firstpage

675

Abstract

Summary form only given. Highly compact microlasers integrated on silicon, emitting in the 1.3-1.6 μm range are important building blocks for future photonic integrated circuits that could be developed for applications such as optical interconnects. In-plane emission and low threshold are desirable for these devices, to be compatible with dense photonic integration. In this paper, we report on the fabrication of InP membrane laser micro-sources integrated on a silicon wafer, based on 2D Photonic Crystal (PC) structures. The PC consists of a triangular lattice of holes formed in the thin membrane. The basic integration procedure includes wafer scale InP transfer onto silicon via SiO₂-SiO₂ bonding and conventional nanofabrication technologies.

Keywords

III-V semiconductors; distributed feedback lasers; indium compounds; integrated optics; membranes; microcavity lasers; nanotechnology; photoluminescence; photonic crystals; quantum well lasers; 1.3 to 1.6 micron; 2D DFB effect; 2D photonic crystal structures; InAsP-InP; InAsP/InP quantum well heterostructures; InP membrane laser micro-sources; InP-SiO₂-Si; PL spectrum; Si; SiO₂-SiO₂ bonding; dense photonic integration; highly compact microlasers; in-plane emission; integration procedure; low threshold; membrane-based photonic crystal light sources; microcavity lasers; nanofabrication technologies; optical interconnects; photonic integrated circuits; silicon wafer; triangular hole lattice; wafer scale InP transfer; Biomembranes; Indium phosphide; Lattices; Light sources; Optical device fabrication; Optical interconnections; Photonic crystals; Photonic integrated circuits; Silicon; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7500-9

Type

conf

DOI

10.1109/LEOS.2002.1159486

Filename

1159486