A management and control framework for prioritized automated material handling services in 300 mm wafer foundry

Semiconductor foundry services demand efficient production of short cycle time and on-time delivery in order to satisfy customers´ requirements. In foundry manufacturing, it is important to differentiate its services to different priorities of process requirements in order to cope with frequent process changes and fine tunes, as well as the small production volumes of products. In this paper, a management and control framework is proposed to support prioritized automated material handling services in a 300 mm foundry fab where highly automated operations in both processing and material transfer are considered as default. This integrated management and control framework will facilitate 300 mm foundry manufacturing to offer better services in both the prediction on cycle time and delivery to critical customers while optimizing the use of underlying resources for regular production.