Investigation of the electrophysical characteristics of a microwave resonator type plasma generator with partial plasma filling of resonating volume

The results of measuring a series of electrophysical characteristics determining the operation of a microwave plasma generator, based on a rectangular shaped resonator with partial filling of the resonating volume with plasma, are presented. It was established that the allocation of the microwave field and local electrical plasma conductivity according to the length of the discharge area shows a periodic character with alternating maximums and minimums. The changes of the temperature values have a rather smooth shape with a small rise near the place of microwave energy input to the resonator. Because of a space inhomogeneity in the parameters of the microwave discharge, the plasma generators of the type given are reasonable for use in such non-precision processes of plasma processing as activation of substrate surfaces of integrated circuits, cleaning from lacquers and polish, plasma-chemical removal of photoresist film coatings, etc. at the density values of microwave power of up to 7/spl times/10/sup 4/ W/m/sup 3/.