Removal of dilute SF6 in emission gas by nonthermal plasma generated by pulsed power

Investigation on removal method of SF₆ was carried out by using nonthermal plasma generated by pulsed power. We investigated the dependence of the discharge power and the polarity of applied pulsed voltage to the reactor on the removal rate of SF₆. The discharge power is varied with discharge repetition rate or charging voltage of the capacitor. As the discharge power increases, the removal rate of SF₆ is increases. The high repetition rate of pulse is more effective for removal of SF₆ than the big value of charging voltage. When the same discharge energy is supplied to the sample gas by changing the residence time or repetition rate, the removal rate is high in short residence time and high repetition rate. The removal rate of SF₆ for negative pulses is higher than that for positive ones. Consequently, the nonthermal plasma generated by pulsed power is effective to remove dilute SF₆ gas completely.