Title :
Active micro heat transport device using thermal pumping system
Author :
Yokoyama, Yoshinori ; Takeda, Munehisa ; Umemoto, Toshiyuki ; Ogushi, Tetsurou
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
We have developed a thermal pumping system for loop-type micro channels, realizing an active micro heat transport device capable of highly efficient cooling. The thermal pumping system makes use of the time change in the vapor pressure of the working fluid as the driving force for fluid circulation. Because it has no mechanically moving elements, it is highly reliable and moreover is effective in preventing deterioration in the heat transport rate due to miniaturization. We set up a system with two thermal pumps within one loop for efficient heat transportation. We fabricated a looped micro-channel, which has a width of 600 μm, a depth of 120 μm and a channel length of 220 mm. We confirmed a flow rate of 12.5 mm/s at the driving frequency of 1 Hz, enabling a heat transport of 0.16 W.
Keywords :
heat transfer; microfluidics; 1 Hz; 120 micron; 220 mm; 600 micron; active micro heat transport device; driving force; fluid circulation; loop-type micro channels; looped micro-channel; no mechanically moving elements; thermal pumping system; time change; vapor pressure; working fluid; Cooling; Frequency; Heat pumps; Maintenance; Research and development; Resistance heating; Telephony; Thermal force; Transportation; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189699