Title :
Arrays of nanowires on silicon wafers
Author :
Rabin, Oded ; Herz, Paul R. ; Lin, Yu-Ming ; Cronin, Stephen B. ; Akinwande, Akintunde I. ; Dresselhaus, Mildred S.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Nanowires made of thermoelectric-relevant materials were grown in the pores of alumina templates fabricated on silicon wafers. This architecture combines the nanometer-scale, self-assembly nature of the anodic alumina with the micro-scale, versatile nature of integrated circuits processing. The nanowires can be made by the pressure injection technique, and even more conveniently by electrochemical deposition. The geometry is adequate for 2-point transport measurements on the nanowire arrays, and for fabrication of nanowire-based devices made of several materials and several components. In this context, a fabrication scheme for a thermoelectric device, containing both n-type and p-type legs, is suggested.
Keywords :
arrays; bismuth; nanowires; self-assembly; thermoelectricity; Al2O3; Bi; Si; alumina templates; electrochemical deposition; integrated circuits processing; nanowire arrays; pressure injection technique; self-assembly; silicon wafers; thermoelectric device; Fabrication; Geometry; Integrated circuit measurements; Leg; Nanoscale devices; Nanowires; Self-assembly; Silicon; Thermoelectric devices; Thermoelectricity;
Conference_Titel :
Thermoelectrics, 2002. Proceedings ICT '02. Twenty-First International Conference on
Print_ISBN :
0-7803-7683-8
DOI :
10.1109/ICT.2002.1190318