Title :
Stress diagnostics in multicrystalline silicon wafers using an acoustic technique
Author :
Belyaev, A. ; Lulu, S. ; Tarasov, I. ; Ostapenko, S. ; Kalejs, J.P.
Author_Institution :
Center for Microelectron. Res., Univ. of South Florida, Tampa, FL, USA
Abstract :
Residual stress is generated in silicon crystals during growth of material for use as substrates for solar cells. This stress affects yield in processing the wafers into cells and modules. We report here on the application of a resonance acoustic method, used previously to measure stress in CZ silicon wafers, to characterize multicrystalline EFG silicon ribbon wafers.
Keywords :
acoustic applications; acoustic resonance; elemental semiconductors; internal stresses; silicon; solar cells; substrates; Si; multicrystalline EFG silicon ribbon wafers; multicrystalline silicon wafers; residual stress; resonance acoustic method; silicon crystals; solar cell substrates; stress diagnostics; Acoustic applications; Acoustic measurements; Crystalline materials; Crystals; Photovoltaic cells; Residual stresses; Resonance; Silicon; Solar power generation; Stress measurement;
Conference_Titel :
Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
Print_ISBN :
0-7803-7471-1
DOI :
10.1109/PVSC.2002.1190526
