Title :
Thick film PZT arrays vibration modes
Author :
Gwirc, Seegio ; García, Fernanda ; Pérez, Nicolas ; Negreira, Carlos
Author_Institution :
CITEI, Instituto Nacional de Tecnologia Ind., Buenos Aires, Argentina
Abstract :
In this work we report some electroacoustic characteristics of miniature piezoelectric ultrasound transducers, manufactured by screen printing and using thick film technology. To make transducer samples, ink with PZT powder and a glass frit was employed. PZT films of 100-130 μm thick were screen-printed between two gold electrodes over alumina. Electrical impedance and acoustic emission continuous-wave analysis at 1-10 MHz range shows two main vibrating modes, one of PZT layer itself and other with substrate and PZT vibrating as a whole and coupling characteristics of a two elements set and an array.
Keywords :
lead compounds; piezoelectric transducers; thick film devices; ultrasonic transducer arrays; vibrations; 1 to 10 MHz; Al2O3; Au; PZT; PZT thick film array; PbZrO3TiO3; acoustic emission continuous-wave analysis; alumina substrate; electrical impedance; electroacoustic characteristics; gold electrode; piezoelectric ultrasound transducer; screen printing; vibration mode; Acoustic transducers; Glass; Ink; Manufacturing; Piezoelectric transducers; Powders; Printing; Thick films; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1192506
