Thick film PZT arrays vibration modes

Author

Gwirc, Seegio ; García, Fernanda ; Pérez, Nicolas ; Negreira, Carlos

Author_Institution

CITEI, Instituto Nacional de Tecnologia Ind., Buenos Aires, Argentina

Volume

2

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

1189

Abstract

In this work we report some electroacoustic characteristics of miniature piezoelectric ultrasound transducers, manufactured by screen printing and using thick film technology. To make transducer samples, ink with PZT powder and a glass frit was employed. PZT films of 100-130 μm thick were screen-printed between two gold electrodes over alumina. Electrical impedance and acoustic emission continuous-wave analysis at 1-10 MHz range shows two main vibrating modes, one of PZT layer itself and other with substrate and PZT vibrating as a whole and coupling characteristics of a two elements set and an array.

Keywords

lead compounds; piezoelectric transducers; thick film devices; ultrasonic transducer arrays; vibrations; 1 to 10 MHz; Al₂O₃; Au; PZT; PZT thick film array; PbZrO3TiO3; acoustic emission continuous-wave analysis; alumina substrate; electrical impedance; electroacoustic characteristics; gold electrode; piezoelectric ultrasound transducer; screen printing; vibration mode; Acoustic transducers; Glass; Ink; Manufacturing; Piezoelectric transducers; Powders; Printing; Thick films; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1192506

Filename

1192506