Title :
Temperature stability of surface acoustic wave resonators on the in-plane rotated 33°Y-cut quartz
Author :
Kanna, Shigeo ; Iizawa, Keigo ; Yamazaki, Takashi ; Takagi, Michiaki
Author_Institution :
Seiko Epson Corp., Nagano, Japan
Abstract :
We present surface acoustic wave resonators on the in-plane rotated 33°Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.
Keywords :
quartz; surface acoustic wave resonators; thermal stability; Euler angle; Rayleigh waves; finite element method; frequency temperature characteristics; in-plane rotated 33°Y-cut quartz; surface acoustic wave resonators; temperature stability; Accuracy; Acoustic measurements; Acoustic waves; Finite element methods; Frequency; Prototypes; Resonance; Stability; Surface acoustic waves; Temperature;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193362
