Title :
Small and low-loss IF SAW filters with excellent temperature coefficient consisting of zinc oxide film on quartz substrate
Author :
Kadota, Michio ; Kando, Hajime
Author_Institution :
Murata Manuf. Co. Ltd., Kyoto, Japan
Abstract :
One of the authors reported that a surface acoustic wave (SAW) substrate with an excellent temperature coefficient of frequency (TCF) and a large electromechanical coupling factor could be realized by a combination of a specific quartz (cut-angle and propagation-direction) substrate having a positive TCF and a ZnO film having a negative TCF from theoretical and experimental investigations. The authors have tried to apply this ZnO/quartz substrate to various SAW filters at an intermediate frequency stage (IF). But, it was clarified that the SAW filter consisting of a single electrode (strip) or single-phase unidirectional transducer (SPUDT) on these substrates often had a large spurious response due to the Love wave which was a higher-order-mode of the Rayleigh wave. The new cut angle of quartz was developed in order to suppress its response. The IF filters for wide-band code division multiple access (W-CDMA: 380 MHz) and narrow-band CDMA (N-CDMA: 183 MHz) were developed by combining the new cut angle quartz and the ZnO film. As a result, small-sized IF filters without a spurious response due to the Love wave and with excellent TCF, low insertion loss, and cost advantages in the applications were obtained. Their frequency shift per 1°C from -20°C to 80°C was less than 0.37 ppm/°C. Their insertion losses were 3.6 to 4.4 dB lower than, those of conventional SAW filters consisting of the ST-X quartz substrate. Adjacent channel sensitivities (ACSs) of the W-CDMA filter were always larger than 36.1 dB/35 dB in the temperature range of -20 to 80°C.
Keywords :
II-VI semiconductors; Love waves; Rayleigh waves; code division multiple access; losses; quartz; semiconductor thin films; surface acoustic wave filters; zinc compounds; -20 to 80 degC; 183 MHz; 380 MHz; IF filters; Love wave; N-CDMA; Rayleigh wave; SAW; SAW filters; SiO2; W-CDMA; ZnO film; ZnO-SiO2; ZnO/quartz substrate; adjacent channel sensitivities; cut-angle; electromechanical coupling factor; frequency shift; higher-order-mode; insertion losses; intermediate frequency stage; low insertion loss; narrow-band CDMA; propagation direction; quartz substrate; single electrode; single-phase unidirectional transducer; small low-loss IF SAW filters; spurious response; surface acoustic wave substrate; temperature coefficient; wide-band code division multiple access; zinc oxide film; Acoustic propagation; Acoustic waves; Frequency; Insertion loss; Multiaccess communication; SAW filters; Substrates; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193377