Title :
Hydrothermally deposited PZT thin film vibration probe sensor
Author :
Sasaki, Misato ; Kanda, Takefumi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro
Author_Institution :
Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
Keywords :
atomic force microscopy; bending; lead compounds; microsensors; piezoelectric thin films; surface acoustic wave sensors; surface topography measurement; vibration measurement; 0.5 nm; AFM; MEMS; PZT; PbZrO3TiO3; high resolution; hydrothermally deposited PZT thin film vibration probe sensor; low contact force; micro electro mechanical systems; quick scanning surface profile measurement; sub micron rule VLSI; touch probe sensor; wide scanning range; Atomic force microscopy; Force measurement; Force sensors; Mechanical variables measurement; Probes; Sputtering; Tactile sensors; Thin film sensors; Very large scale integration; Vibrations;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193439
