DocumentCode :
393244
Title :
NSPUDT resonator on langasite
Author :
Fachberger, R. ; Riha, E. ; Born, E. ; Ruile, W. ; Wolff, U. ; Pongratz, P. ; Kronholz, S.
Author_Institution :
Vienna Univ. of Technol., Austria
Volume :
1
fYear :
2002
fDate :
8-11 Oct. 2002
Firstpage :
501
Abstract :
A SAW resonator design for NSPUDT substrates like Langasite with cut angles (0°,14°,22-24°) has been developed. It consists of a natural single phase unidirectional transducer (NSPUDT) combined with a bidirectional split finger transducer within reflection gratings. The resonance frequency of the two port resonators is around 400 MHz depending on the used crystal cut The measured frequency response shows excellent agreement with a P-matrix based simulation of the devices. The NSPUDT resonators processed on different Langasite (La3Ga5SiO14) and Langatate (La3Ta0.5Ga5.5O14) wafers exhibit an insertion attenuation as low as 2.8 dB and loaded Q-values of up to 15000.
Keywords :
gallium compounds; lanthanum compounds; surface acoustic wave resonators; La3Ga5SiO14; La3Ta0.5Ga5.5O14; Langasite substrate; NSPUDT resonators; P-matrix based simulation; SAW resonator; bidirectional split finger transducer; frequency response; insertion attenuation; loaded Q-values; natural single phase unidirectional transducer; reflection gratings; resonance frequency; two port resonators; Attenuation; Fingers; Frequency measurement; Frequency response; Gratings; Reflection; Resonance; Resonant frequency; Surface acoustic waves; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-7582-3
Type :
conf
DOI :
10.1109/ULTSYM.2002.1193451
Filename :
1193451
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=393244
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