DocumentCode
393275
Title
Film air bearings generated by ultrasonic vibrations
Author
Hladky-Hennion, Anne-Christine ; Granger, Christian ; Haw, Gérard
Author_Institution
ISEN Dept., IEMN, Lille, France
Volume
1
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
683
Abstract
Film air bearings generated by a piezoelectric bimorph present many advantages in comparison with conventional air bearing systems, because they are autonomous and they take a reduced place. This paper first presents the working principle, then theoretical formulation for the fluid domain. Several prototypes are designed using the ATILA finite element code and are built. The experimental procedure is detailed with a view to measuring the air bearing thickness and its relative variations.
Keywords
finite element analysis; machine bearings; piezoelectric devices; ultrasonic applications; ATILA finite element code; film air bearings; fluid domain; piezoelectric bimorph; ultrasonic vibrations; Amplitude modulation; Capacitance measurement; Finite element methods; Frequency; Friction; Levitation; Piezoelectric films; Pistons; Prototypes; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1193493
Filename
1193493
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