Title :
Integrated web-based architecture for correlative engineering data analysis and decision support
Author :
Tandon, Navin ; Cleverdon, Dana ; Hinshaw, Bill
Author_Institution :
Kilby Center (KFAB), Texas Instruments, Dallas, TX, USA
fDate :
31 March-1 April 2003
Abstract :
In the dynamic environment of frequently changing technology cycles, semiconductor manufacturing companies strive to optimize processes quickly to increase yields across a myriad of device types being designed and processed simultaneously in a factory. Immense quantities of process and test data are usually collected during silicon processing, and computerized tools are used to extract and analyze the engineering data for decision support. An integrated web-based architecture using Spotfire DecisionSite™ framework has been implemented at Kilby Center (KFAB) of Texas Instruments (TI) for engineering data analysis. Rather than merely providing access to the different data sets to the end users, the established infrastructure provides an enormous value by facilitating data merges and correlative analyses across the multiple and complex data warehouses. Ease of employing these correlation techniques has lead to improvements in device designs, process corrections, equipment maintenance, and yields.
Keywords :
Internet; correlation methods; data analysis; data warehouses; decision support systems; engineering information systems; integrated circuit manufacture; integrated circuit yield; manufacturing data processing; silicon; technical support services; Kilby Center; Si; Si processing; Spotfire DecisionSite framework; computerized tools; correlation techniques; correlative analyses; data merges; data warehouses; decision support; dynamic environment; engineering data analysis; integrated web-based architecture; parametric testing; process data; semiconductor manufacturing; test data; yield enhancement; Data analysis; Data engineering; Data mining; Design optimization; Manufacturing processes; Process design; Production facilities; Semiconductor device manufacture; Silicon; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Print_ISBN :
0-7803-7681-1
DOI :
10.1109/ASMC.2003.1194506