• DocumentCode
    393518
  • Title

    Polymer micro cantilevers for force controlled atomic force microscopy 2 - Fabrication of cantilevers

  • Author

    Kato, Nobuhiro ; Park, Choong Sik ; Matsumoto, Toshiro ; Kikuta, Hisao ; Iwata, Koichi

  • Author_Institution
    Fac. of Biol. Oriented Sci. & Technol., Kinki Univ., Wakayama, Japan
  • Volume
    2
  • fYear
    2002
  • fDate
    5-7 Aug. 2002
  • Firstpage
    1033
  • Abstract
    The micro cantilever made of entirely plastic material has been developed. The probing tip, cantilever and base are made of same photo plastic. By arranging the geometry of the cantilever, its spring constant and resonant frequency is controlled. The low Q of the polyimide improves the stability of the force controlled atomic force microscope. The fabrication error in cantilever geometry was 1.5%. The estimated resonant frequency has a good agreement with the designed value.
  • Keywords
    force control; micromachining; microscopes; cantilever; cantilever geometry; force controlled atomic force microscope; force controlled atomic force microscopy; micro cantilever; photo plastic; Atomic force microscopy; Fabrication; Force control; Geometry; Plastics; Polyimides; Polymers; Resonant frequency; Springs; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SICE 2002. Proceedings of the 41st SICE Annual Conference
  • Print_ISBN
    0-7803-7631-5
  • Type

    conf

  • DOI
    10.1109/SICE.2002.1195313
  • Filename
    1195313
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=393518