DocumentCode
393638
Title
Integrated design of structure/control systems in micromachines
Author
Ando, Hiroki ; Hiramoto, Kazuhiko ; Obinata, Goro
Author_Institution
Graduate Sch. of Eng., Nagoya Univ., Japan
Volume
1
fYear
2002
fDate
5-7 Aug. 2002
Firstpage
605
Abstract
A design problem of active controlled micromachines has been considered in this paper. Stable two-dimensional vibration of a structure at pm-specified frequencies is sought subject to the vibration amplitude and the actuator capacity requirements. It is shown that the simultaneous optimization both on the mechanical structure and the active controller is quite useful for this kind of design problem.
Keywords
control engineering; micromechanical devices; optimal control; stability; vibration control; active controlled micromachines; actuator capacity requirements; pm-specified frequencies; simultaneous optimization; stable 2D vibration; stable two-dimensional vibration; structure/control system integrated design; vibration amplitude; Actuators; Control systems; Design engineering; Design optimization; Equations; Fabrication; Mirrors; Open loop systems; Springs; Vibration control;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN
0-7803-7631-5
Type
conf
DOI
10.1109/SICE.2002.1195477
Filename
1195477
Link To Document