Title :
Surface roughness measurement using laser diffraction pattern obtained by a video camera and photo-sensors
Author :
Mouri, Akinoro ; Aoki, Nobuya ; Inari, Takahiko
Author_Institution :
Kinki Univ., Wakayama, Japan
Abstract :
Surface roughness can be measured using diffraction pattern formed through reflection on the target surface, In order to realize a practical on-line measurement, the method using a video camera and some photo-sensors to read the intensity distribution of the diffraction pattern is proposed. The deviation between the true distribution and the calculated result is examined in this paper.
Keywords :
computerised instrumentation; light diffraction; measurement by laser beam; online operation; optical sensors; surface topography measurement; video cameras; diffraction pattern; intensity distribution; laser diffraction pattern; online measurement; photo-sensors; photosensors; surface roughness measurement; target surface reflection; video camera; Cameras; Equations; Inspection; Monitoring; Optical diffraction; Optical reflection; Optical surface waves; Rough surfaces; Surface emitting lasers; Surface roughness;
Conference_Titel :
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN :
0-7803-7631-5
DOI :
10.1109/SICE.2002.1195812
