DocumentCode :
393769
Title :
CO2/H2O gas sensor with a MEMS Fabry-Perot filter
Author :
Noro, Makoto ; Suzuki, Kentaro ; Kishi, Naoki ; Hata, Hiroki ; Watanabe, Tetsuya ; Iwaoka, Hideto
Author_Institution :
Yokogawa Electr. Corp., Nagano, Japan
Volume :
3
fYear :
2002
fDate :
5-7 Aug. 2002
Firstpage :
1395
Abstract :
An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 μm to 4.5 μm has been developed for nondispersive infrared (NDIR) CO2/H2O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
Keywords :
carbon compounds; electrostatic devices; gas sensors; infrared detectors; micromechanical devices; optical filters; water; 2.5 to 4.5 micron; CO2; H2O; NDIR CO2/H2O gas sensor; electrostatically driven tunable MEMS Fabry-Perot filter; nondispersive IR gas sensors; nondispersive infrared gas sensors; Air conditioning; Atmospheric measurements; Electromagnetic wave absorption; Fabry-Perot; Gas detectors; Infrared sensors; Micromechanical devices; Optical filters; Pollution measurement; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN :
0-7803-7631-5
Type :
conf
DOI :
10.1109/SICE.2002.1196506
Filename :
1196506
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=393769
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