• DocumentCode
    393769
  • Title

    CO2/H2O gas sensor with a MEMS Fabry-Perot filter

  • Author

    Noro, Makoto ; Suzuki, Kentaro ; Kishi, Naoki ; Hata, Hiroki ; Watanabe, Tetsuya ; Iwaoka, Hideto

  • Author_Institution
    Yokogawa Electr. Corp., Nagano, Japan
  • Volume
    3
  • fYear
    2002
  • fDate
    5-7 Aug. 2002
  • Firstpage
    1395
  • Abstract
    An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 μm to 4.5 μm has been developed for nondispersive infrared (NDIR) CO2/H2O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
  • Keywords
    carbon compounds; electrostatic devices; gas sensors; infrared detectors; micromechanical devices; optical filters; water; 2.5 to 4.5 micron; CO2; H2O; NDIR CO2/H2O gas sensor; electrostatically driven tunable MEMS Fabry-Perot filter; nondispersive IR gas sensors; nondispersive infrared gas sensors; Air conditioning; Atmospheric measurements; Electromagnetic wave absorption; Fabry-Perot; Gas detectors; Infrared sensors; Micromechanical devices; Optical filters; Pollution measurement; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SICE 2002. Proceedings of the 41st SICE Annual Conference
  • Print_ISBN
    0-7803-7631-5
  • Type

    conf

  • DOI
    10.1109/SICE.2002.1196506
  • Filename
    1196506
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=393769