Title :
Electrostatical coupling-spring for micro-mechanical filtering applications
Author :
Galayko, Dimitri ; Kaiser, Andreas ; Buchaillot, Lionel ; Collard, Dominique ; Combi, Chantal
Author_Institution :
IEMN-ISEN, France
Abstract :
This paper presents a novel method of implementing coupled resonator micro-mechanical (MEMS) filters without mechanical springs. The method proposes to use an electrostatical spring, formed by two or more electrostatical transducers, to couple single resonators. This spring has a stiffness controlled by bias voltages, thus variable-bandwidth filters can be obtained. An original biasing scheme is used to avoid external connections on sensitive signal nodes. Theoretical analysis as well as experimental results on 4-th order bandpass filters at 2.5 MHz are presented.
Keywords :
Q-factor; band-pass filters; electrostatic devices; micromechanical resonators; passive filters; radiofrequency filters; resonator filters; 2.5 MHz; bias voltage controlled spring stiffness; biasing scheme; coupled resonator MEMS filters; electrostatical coupling-spring; electrostatical transducers; fourth-order bandpass filters; micro-mechanical filtering applications; variable-bandwidth filters; Band pass filters; Bandwidth; Capacitance; Filtering; Frequency; Microelectronics; Resonator filters; Springs; Transducers; Voltage;
Conference_Titel :
Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
Print_ISBN :
0-7803-7761-3
DOI :
10.1109/ISCAS.2003.1205073
