DocumentCode
396299
Title
Photoluminescence and energy dispersive X-ray measurements on residual strain in bulk InxGa1-xAs crystal
Author
Islam, M.R. ; Yamada, M.
Author_Institution
Dept. of Electron. & Inf. Sci., Kyoto Inst. of Technol., Japan
fYear
2003
fDate
12-16 May 2003
Firstpage
571
Lastpage
574
Abstract
Photoluminescence (PL) and energy dispersive X-ray (EDX) experiments have been performed to measure both residual strain and composition in bulk InxGa1-xAs mixed crystal grown by the normal freezing technique. It is found from the comparison between the PL and EDX results that there exists a large amount of residual strain due to the compositional variation in the crystal. In order to evaluate the amount of residual strain, a simple one-dimensional strain model has been proposed. Using the model, the strain profiles estimated independently from the EDX and PL data are in agreement. Moreover, the compositional profile measured by EDX fairly agrees with that obtained after excluding the strain from the PL data.
Keywords
III-V semiconductors; X-ray chemical analysis; energy gap; gallium arsenide; indium compounds; internal stresses; photoluminescence; InxGa1-xAs; bulk InxGa1-xAs crystal; compositional variation; energy dispersive X-ray measurements; freezing technique; one-dimensional strain model; photoluminescence; residual strain; strain profiles; Capacitive sensors; Crystalline materials; Crystals; Dispersion; Energy measurement; Lattices; Photodetectors; Photoluminescence; Shape measurement; Strain measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2003. International Conference on
Print_ISBN
0-7803-7704-4
Type
conf
DOI
10.1109/ICIPRM.2003.1205445
Filename
1205445
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