DocumentCode :
396958
Title :
Imaging at the nano-scale
Author :
Rifai, Osamah M El ; Aumond, Bernardo D. ; Youcef-Toumi, Kamal
Author_Institution :
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Volume :
2
fYear :
2003
fDate :
20-24 July 2003
Firstpage :
715
Abstract :
Surface characteristics such as topography and critical dimensions serve as important indicators of product quality and manufacturing process performance especially at the micrometer and the nanometer scales. This paper first reviews different technologies used for obtaining high precision 3-D images of surfaces, along with some selected applications. Atomic force microscopy (AFM) is one of such methods. These images are commonly distorted by convolution effects, which become more prominent when the sample surface contains high aspect ratio features. In addition, data artifacts can result from poor dynamic response of the instrument used. In order to achieve reliable data at high throughput, dynamic interactions between the instrument´s components need to be well understood and controlled, and novel image deconvolution schemes need to be developed. Our work aims at mitigating these distortions and achieving reliable data to recover metrology soundness. A summary of our findings will be presented.
Keywords :
atomic force microscopy; deconvolution; dynamic response; stereo image processing; surface topography; 3D images; AFM; aspect ratio; atomic force microscopy; convolution effects; data artifacts; dynamic interactions; dynamic response; image deconvolution; instruments components; manufacturing process; metrology soundness; nanoscale imaging; product quality; stereo image processing; surface characteristics; surface topography; Atomic force microscopy; Manufacturing processes; Mechanical engineering; Optical imaging; Optical interferometry; Optical scattering; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN :
0-7803-7759-1
Type :
conf
DOI :
10.1109/AIM.2003.1225431
Filename :
1225431
Link To Document :
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