Title :
Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors
Author :
Wang, Xuefeng ; Vincent, Loren ; Yu, Minfeng ; Huang, Yonggang ; Liu, Chang
Author_Institution :
Illinois Univ., Urbana, IL, USA
Abstract :
We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.
Keywords :
end effectors; focused ion beam technology; micromachining; micromanipulators; micromechanical devices; nanotechnology; sputter etching; ion beam milling; micromachining; nanofabrication techniques; nanoscale end effectors; nanoscopic objects; thermal bimetallic actuation principle; three probe MEMS nanomanipulator; Carbon nanotubes; Ion beams; Micromechanical devices; Milling; Nanobioscience; Nanomaterials; Nanostructured materials; Nanowires; Probes; Semiconductor nanostructures;
Conference_Titel :
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN :
0-7803-7759-1
DOI :
10.1109/AIM.2003.1225460
