Title :
High-Q inductors on digital VLSI CMOS substrate for analog RF applications
Author :
Ellinger, Frank ; Kossel, Marcel ; Huber, Meik ; Schmatz, Martin ; Kromer, Christian ; Sialm, Gion ; Barras, David ; Rodoni, Lucio ; von Buren, G. ; Jackel, Heinz
Author_Institution :
Electron. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
Abstract :
In this paper, the design, modeling and performance of high-Q RF inductors using aggressively scaled digital VLSI CMOS technology are presented. Quality factors of 12.7 and 10, and self resonance frequencies of 45 GHz and 29 GHz are measured for inductors with values of 0.31 nH and 0.9 nH, respectively. The influence of parasitics is also investigated.
Keywords :
CMOS analogue integrated circuits; MMIC; Q-factor; VLSI; circuit simulation; thin film inductors; 29 GHz; 45 GHz; MMIC; analog RF IC; digital VLSI CMOS substrates; high-Q RF inductors; microwave integrated circuits; parasitic resistance; self resonance frequency; CMOS technology; Conductivity; Inductors; Integrated circuit technology; MOSFETs; Q factor; Radio frequency; Spirals; Substrates; Very large scale integration;
Conference_Titel :
Microwave and Optoelectronics Conference, 2003. IMOC 2003. Proceedings of the 2003 SBMO/IEEE MTT-S International
Print_ISBN :
0-7803-7824-5
DOI :
10.1109/IMOC.2003.1242694
