Verification of multi-functional vertical furnace

We verify multi-functional mini-batch vertical furnace. The mini-batch furnace, which was proposed, based on Agile Fab concept, should form different kinds of films alternately and have short RPT (raw process time). When the process recipes, such as TEOS, SiN and Poly-Si deposition and thermal oxide, are optimized, all RPTs dramatically reduce and achieve to be shorter than 1 hour. When different kinds of films are alternately formed in single chamber, process stability of film formation is excellent. In case of SiN and TEOS, triple relative standard deviations (RSDs) of growth rate are less than 5% and averages of particulate (more than 0.2 um) are fewer than 15. In case of thermal oxide and Poly-Si, triple RSDs of film thickness are less than 5% and averages of particulate are fewer than 10. Furthermore, it is demonstrated that the quality of thermal oxide film formed by the multi-functional tool is equivalent to that formed by conventional tool. We develop and realize the mini-batch furnace based on Agile Fab concept.