Title :
Process monitoring via independent components
Author :
Shannon, Thaddeus T. ; Abercrombie, David ; McNames, James
Author_Institution :
Syst. Sci. Program, Portland State Univ., OR, USA
Abstract :
We propose a method for process monitoring of a semiconductor manufacturing process. Independent component analysis (ICA) is applied to characterize E-test parameter data. We calculate angular confidence intervals for the model, eliminate marginally significant components and implement control charts for significant components of interest. Alarms are generated off of deviations in the charted components. Alarms are easily used in process diagnosis based on the interpretation of the independent components.
Keywords :
control charts; independent component analysis; parameter estimation; process monitoring; semiconductor device manufacture; statistical process control; E-test parameter data; Independent component analysis; alarms; angular confidence intervals; control charts; independent components; process diagnosis; process monitoring; semiconductor manufacturing process; statistical process control; Circuit testing; Computerized monitoring; Independent component analysis; Manufacturing processes; Mutual information; Principal component analysis; Process control; Production; Random variables; Semiconductor device manufacture;
Conference_Titel :
Systems, Man and Cybernetics, 2003. IEEE International Conference on
Print_ISBN :
0-7803-7952-7
DOI :
10.1109/ICSMC.2003.1244430
