DocumentCode
399016
Title
Tunable thin film filters
Author
Domash, L. ; Ma, E. ; Nemchuk, N. ; Payne, A. ; Wu, M.
Author_Institution
Aegis Semiconductor Inc., Woburn, MA, USA
fYear
2003
fDate
23-28 March 2003
Firstpage
522
Abstract
We report widely tunable thin film filters, including both single-cavity and multicavity designs, based on thermo-optic effects in thin films of amorphous semiconductors deposited by PECVD. Applications include an optical channel monitor packaged in a TO can.
Keywords
amorphous semiconductors; optical design techniques; optical films; optical filters; optical tuning; plasma CVD; semiconductor thin films; thermo-optical effects; PECVD; amorphous semiconductors; multicavity designs; optical channel monitor packaging; single-cavity designs; thermo-optic effect; thin film filters; Amorphous silicon; Dielectric thin films; Optical fiber filters; Optical films; Plasma temperature; Semiconductor films; Semiconductor thin films; Sputtering; Transistors; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN
1-55752-746-6
Type
conf
DOI
10.1109/OFC.2003.1248384
Filename
1248384
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