Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000×1000-port optical crossconnect

Author

Gasparyan, A. ; Shea, H. ; Arney, S. ; Aksyuk, V. ; Simon, M.E. ; Pardo, F. ; Chan, H.B. ; Kim, J. ; Gates, J. ; Kraus, J.S. ; Goyal, S. ; Carr, D. ; Kleiman, R.

Author_Institution

Lucent Technol. Bell Labs., Murray Hill, NJ, USA

fYear

2003

fDate

23-28 March 2003

Abstract

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000 G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss nonblocking 1000×1000-port optical cross-connect switch.

Keywords

elemental semiconductors; hermetic seals; mechanical stability; micromechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; optical materials; optical switches; silicon; Si; angular stability; fabrication; hermetically sealed mirror arrays; mechanical shock tolerant; micromirrors; optical cross-connect switch; simulated office vibrations; single-crystal silicon; tilting mirrors; two-axis MEMS; Dielectrics; Electric shock; Electrodes; Micromechanical devices; Mirrors; Optical arrays; Optical fiber networks; Optical losses; Optical switches; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communications Conference, 2003. OFC 2003

Print_ISBN

1-55752-746-6

Type

conf

DOI

10.1109/OFC.2003.1248617

Filename

1248617