Title :
Towards modular integrated sensors: the development of artificial haircell sensors using efficient fabrication methods
Author :
Chen, Jack ; Fan, Zhifang ; Engel, Jonathan ; Liu, Chang
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.
Keywords :
mechanoception; micromachining; sensors; artificial haircell sensors; biological hair cells; biology; fabrication methods; microstructures; modular integrated sensors; polymer surface micromachining; silicon bulk micromachining; three dimensional assembly; versatile mechanoreceptor; Assembly; Biological system modeling; Biosensors; Cells (biology); Fabrication; Hair; Micromachining; Microstructure; Polymers; Silicon;
Conference_Titel :
Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on
Print_ISBN :
0-7803-7860-1
DOI :
10.1109/IROS.2003.1249220
