Title :
GaAs membrane supported millimeter wave circuits
Author :
Muller, A. ; Konstantinidis, G. ; Neculoiu, D. ; Lagadas, M. ; Deligeorgis, G. ; Vasilache, D. ; Bary, L. ; Plana, R. ; Petrini, L. ; Buiculescu, C. ; Kornilios, N.
Author_Institution :
IMT Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
The paper presents the author´s contributions towards the development of the millimeter wave circuits based on GaAs micromachining. The manufacturing and characterisation of low losses, GaAs membrane supported band pass filters for 38 GHz, 45 GHz and 77 GHz as well as a fully integrated millimeter wave receiver structure having the antenna and the detecting Schottky diode on the same GaAs membrane are presented.
Keywords :
III-V semiconductors; MMIC; band-pass filters; gallium arsenide; micromachining; micromechanical devices; millimetre wave circuits; millimetre wave receivers; 38 GHz; 45 GHz; 77 GHz; GaAs; GaAs membrane supported millimeter wave circuits; antenna; detecting Schottky diode; fully integrated millimeter wave receiver structure; hand pass filters; low losses; micromachining; Biomembranes; Dielectric substrates; Filters; Gallium arsenide; Manufacturing; Micromachining; Millimeter wave circuits; Millimeter wave communication; Millimeter wave technology; Wet etching;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251344
