DocumentCode
399800
Title
Modelling of matched microstrip lines on bulk and micromachined silicon substrates
Author
Cismaru, A. ; Marcelli, R. ; Sajin, G. ; Craciunolu, F.
Author_Institution
Nat. Res. & Dev. Inst. for Microtechnologies, Bucharest, Romania
Volume
1
fYear
2003
fDate
28 Sept.-2 Oct. 2003
Abstract
In this paper, two matched microstrip line configurations for the excitation of magnetostatic wave resonators (SER) have been studied for optimizing the SER performances. The first transducer was designed on a bulk silicon substrate, and the second one suspended on a micromachined membrane, to be realized by means of wet anisotropic etching. These configurations were simulated by Microwave Office.
Keywords
elemental semiconductors; etching; magnetic microwave devices; magnetostatic wave devices; micromachining; micromechanical resonators; microstrip lines; silicon; SER performances; Si; first transducer; magnetostatic wave resonators; matched microstrip lines; micromachined Si substrates; micromachined membrane; wet anisotropic etching; Aluminum; Biomembranes; Circuit simulation; Magnetostatic waves; Microstrip resonators; Microwave devices; Research and development; Scattering parameters; Silicon; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN
0-7803-7821-0
Type
conf
DOI
10.1109/SMICND.2003.1251359
Filename
1251359
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