Title :
Modelling of matched microstrip lines on bulk and micromachined silicon substrates
Author :
Cismaru, A. ; Marcelli, R. ; Sajin, G. ; Craciunolu, F.
Author_Institution :
Nat. Res. & Dev. Inst. for Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
In this paper, two matched microstrip line configurations for the excitation of magnetostatic wave resonators (SER) have been studied for optimizing the SER performances. The first transducer was designed on a bulk silicon substrate, and the second one suspended on a micromachined membrane, to be realized by means of wet anisotropic etching. These configurations were simulated by Microwave Office.
Keywords :
elemental semiconductors; etching; magnetic microwave devices; magnetostatic wave devices; micromachining; micromechanical resonators; microstrip lines; silicon; SER performances; Si; first transducer; magnetostatic wave resonators; matched microstrip lines; micromachined Si substrates; micromachined membrane; wet anisotropic etching; Aluminum; Biomembranes; Circuit simulation; Magnetostatic waves; Microstrip resonators; Microwave devices; Research and development; Scattering parameters; Silicon; Transducers;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251359
