DocumentCode
399802
Title
A "toggle switch" for RF applications - mechanical behavior simulation
Author
Tibeica, C. ; Moagar-Poladian, V. ; Vladoianu, F. ; Vasilache, D. ; Voitincu, C.
Author_Institution
Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2003
fDate
28 Sept.-2 Oct. 2003
Abstract
An electrostatically actuated RF switch has been proposed and simulated, in order to eliminate some inconvenient of such devices. The proposed design offers a solution for stiction effect, namely the phenomenon whereby parts of the device bonded together upon physical contact. Simulation´s results concerning the device performance including actuation voltage, mechanical contact, and residual stress effects are presented.
Keywords
internal stresses; microswitches; microwave devices; RF applications; actuation voltage; electrostatically actuated RF switch; mechanical behavior simulation; mechanical contact; residual stress; stiction effect; toggle switch; Bonding; Contacts; Electrodes; Micromechanical devices; Radio frequency; Research and development; Residual stresses; Surface morphology; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN
0-7803-7821-0
Type
conf
DOI
10.1109/SMICND.2003.1251361
Filename
1251361
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