Title :
Analysis and optimization of the Bragg reflector for tunable photodetector with planar mirror optical microcavity on silicon substrate
Author :
Purica, M. ; Budianu, E. ; Kusko, M. ; Dragoman, D. ; Dinescu, G.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
An analytical model for calculating the reflection and transmission coefficients of a Bragg reflector with periodic structure is reported. Using explicit expressions for these coefficients the reflectivity of the periodic structures was simulated for different pairs of layer materials (SiO2/Si3N4.poly-Si/SiO2, Si/air-gap and SiO2/Au) and layer thickness. Our method allows the rapid evaluation of reflectance of Bragg reflector with periodic structure.
Keywords :
Bragg gratings; photodetectors; photoreflectance; Bragg reflector; Si; Si substrate; Si/air-gap; SiO2-Au; SiO2-Si3N4-Si-SiO2; SiO2/Au; SiO2/Si3N4.poly-Si/SiO2; analytical model; layer thickness; planar mirror optical microcavity; reflection coefficients; transmission coefficients; tunable photodetector; Air gaps; Analytical models; Microcavities; Mirrors; Optical materials; Optical reflection; Periodic structures; Photodetectors; Reflectivity; Silicon;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251367
