Title :
Some aspects of substrates microconfiguration for MCMs applications using laser technologies
Author :
Cernica, I. ; Manea, E. ; Ulieru, D. ; Gavrilescu, D.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
The paper presents some experiments of using laser technology in microconfiguration for MCMs applications in MST domain. The experiments were performed on silicon and silicon/dielectric/metallic thin films. We obtain results both for surface (nets) and bulk (hole trough substrate) and established process programs. Further experiments will be necessary in order to optimize the roughness and the geometry control for bulk micoconfiguration.
Keywords :
laser materials processing; micro-optics; micromachining; multichip modules; substrates; surface roughness; MCMs applications; MST domain; geometry control; hole trough substrate; laser technologies; nets; process programs; roughness; substrates microconfiguration; Dielectric substrates; Dielectric thin films; Geometry; Laser ablation; Laser applications; Laser beam cutting; Mirrors; Paper technology; Rough surfaces; Silicon;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251369
