DocumentCode
399808
Title
Some aspects of substrates microconfiguration for MCMs applications using laser technologies
Author
Cernica, I. ; Manea, E. ; Ulieru, D. ; Gavrilescu, D.
Author_Institution
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2003
fDate
28 Sept.-2 Oct. 2003
Abstract
The paper presents some experiments of using laser technology in microconfiguration for MCMs applications in MST domain. The experiments were performed on silicon and silicon/dielectric/metallic thin films. We obtain results both for surface (nets) and bulk (hole trough substrate) and established process programs. Further experiments will be necessary in order to optimize the roughness and the geometry control for bulk micoconfiguration.
Keywords
laser materials processing; micro-optics; micromachining; multichip modules; substrates; surface roughness; MCMs applications; MST domain; geometry control; hole trough substrate; laser technologies; nets; process programs; roughness; substrates microconfiguration; Dielectric substrates; Dielectric thin films; Geometry; Laser ablation; Laser applications; Laser beam cutting; Mirrors; Paper technology; Rough surfaces; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN
0-7803-7821-0
Type
conf
DOI
10.1109/SMICND.2003.1251369
Filename
1251369
Link To Document