Title :
Design and fabrication of diffractive optical elements
Author :
Kusko, M. ; Cojoc, D. ; Apostol, D. ; Muller, R. ; Manea, E. ; Podaru, C.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
In this paper is presented the design, fabrication and characterization of a binary phase-contrast transmission diffractive optical element made by wet etching of the glass substrate. The etch depth was controlled by profilometry measurement. The experimental result is close to the result obtained by simulations.
Keywords :
diffractive optical elements; etching; optical design techniques; optical fabrication; binary phase-contrast transmission diffractive optical element; characterization; design; diffractive optical elements; etch depth; fabrication; glass substrate; profilometry measurement; wet etching; Chromium; Glass; Gold; Optical design; Optical device fabrication; Optical diffraction; Rough surfaces; Surface roughness; US Department of Energy; Wet etching;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251370
