Title :
Low-loss, single-mode photonic wires and ring resonators in silicon-on-insulator
Author :
Dumon, Pieter ; Bogaerts, W. ; Campenhout, Joris Van ; Wiaux, Vincent ; Wouters, Johan ; Beck, Stephan ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Gent, Belgium
Abstract :
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation losses as low as 2.4 dB/cm. We also constructed compact racetrack and resonators in these waveguides with a Q larger than 3000.
Keywords :
Q-factor; integrated optics; micromechanical resonators; optical losses; optical resonators; optical waveguides; ridge waveguides; silicon-on-insulator; Q-factor; compact racetrack; low-loss photonic wires; optical waveguides; propagation losses; ring resonators; silicon-on-insulator; single-mode photonic wires; Etching; Length measurement; Loss measurement; Optical losses; Optical ring resonators; Oxidation; Photonic integrated circuits; Propagation losses; Silicon on insulator technology; Wires;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1251751
