DocumentCode
400882
Title
In-line/in-situ doping monitoring facility using ion beams at Alabama A&M University
Author
Muntele, C.I. ; Muntele, I.C. ; Ila, D. ; Holland, L.R. ; Zimmerman, R.L. ; Nisen, D. ; Schilloff, M.
fYear
2002
fDate
27-27 Sept. 2002
Firstpage
356
Lastpage
358
Abstract
Here we present the design and features of the project of upgrading the existing ion beam facilities available at the Center for Irradiation of Materials of Alabama A&M University (CIM-AAMU). We intend to join the zero degrees output of the ion accelerator with the low energy output of the ion implanter in a common chamber. When finalized, the facility will allow in-line/in-situ sample modification and characterization.
Keywords
Rutherford backscattering; atomic absorption spectroscopy; channelling; ion accelerators; ion implantation; ion microprobe analysis; spectrophotometry; tandem accelerators; vacuum pumps; Pelletron accelerator; Rutherford backscattering spectroscopy; UV-visible optical absorption spectrophotometry; channeling; common chamber; in-line in-situ doping monitoring facility; ion accelerator; ion beam facilities; low energy ion implantation; low energy output; nuclear reaction analysis; particle-induced gamma-ray emission; residual gas analyzer; sample modification; scintillating detector; tandem accelerator; turbomolecular pumps; upgrading project; zero degrees output; Doping; Elementary particle vacuum; Instruments; Ion accelerators; Ion beams; Ion implantation; Monitoring; National electric code; Spectroscopy; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
Conference_Location
Taos, New Mexico, USA
Print_ISBN
0-7803-7155-0
Type
conf
DOI
10.1109/IIT.2002.1258014
Filename
1258014
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