Title :
Improvements to the ease of LINAC Dataset generation for high energy
Author :
Halling, A.M. ; Murphy, John ; Nitodas, S.F.
Abstract :
High-energy ion implanters using RF acceleration have advantages over electrostatic implementations. However, in order to generate quality beams each successive RF resonator phase and amplitude must be adjusted to accept beam from the preceding resonator and accelerate it in a manner that produces the desired acceleration. A new method of obtaining optimal beam tuning is described. Test results are shown documenting that optimum beam performance can be achieved with minimal tuning times.
Keywords :
ion accelerators; ion implantation; linear accelerators; semiconductor doping; LINAC Dataset generation for high energy; RF acceleration; amplitude; electrostatic implementations; high-energy ion implanters; optimal beam tuning; successive RF resonator phase; Acceleration; Electrostatics; Helium; Linear accelerators; Linear particle accelerator; Magnetic analysis; Magnetic separation; Particle beams; Radio frequency; Voltage;
Conference_Titel :
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
Conference_Location :
Taos, New Mexico, USA
Print_ISBN :
0-7803-7155-0
DOI :
10.1109/IIT.2002.1258056