High efficiency and low cost LINAC system design suitable for high energy ion implanters

A new radio frequency (rf) linear accelerator (LINAC) system with high efficiency has been developed by AIBT. The general designs of such a rf LINAC system are briefly discussed. This system includes a plurality of resonators each including an inductor circuit that is connected to at least two rf electrodes. Detailed designs of a system where two of the adjacent rf electrodes are connected to the same inductor circuit are presented. A prototype LINAC system of one resonator that has an inductor circuit connecting two rf electrodes was constructed and tested. The beam energy gains (¹¹B⁺ ions) of the prototype system were demonstrated to be 230 keV with input rf power of 2 kW. This result indicates that one can accelerate singly charged ions from 80 keV to 1 MeV with a four resonator LINAC system and 10 kW electric power.