Title :
GaAs MEMS for millimeter wave communications
Author :
Muller, Alexandru ; Konstantinidis, George ; Neculoiu, Dan ; Plana, Robert
Author_Institution :
IMT Bucharest, Romania
Abstract :
The paper presents the authors´ contributions towards the development of millimeter wave circuits based on GaAs micromachining. The manufacturing and characterization of different type of millimeter wave GaAs membrane supported filter structures is presented. A fully monolithically integrated millimeter wave receiver module, having the antenna as well as the detecting Schottky diode on the same GaAs membrane is also presented.
Keywords :
III-V semiconductors; MIMIC; Schottky diodes; gallium arsenide; membranes; micromachining; micromechanical devices; millimetre wave antennas; millimetre wave diodes; millimetre wave filters; millimetre wave receivers; CPW lines; GaAs; MEMS; detecting Schottky diode; integrated antenna; membrane supported filter structures; micromachining; millimeter wave communications; monolithically integrated receiver module; Biomembranes; Circuits; Filters; Gallium arsenide; MIMICs; Manufacturing; Micromachining; Micromechanical devices; Millimeter wave communication; Receiving antennas;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262211
