Title :
The effect of low-k dielectrics on RFIC inductors
Author :
Jeon, Jong-Hyeok ; Inigo, Emigdio J. ; Reiha, Michael T. ; Choi, Tae-Young ; Lee, Yongshik ; Mohammadi, Saeed ; Katehi, Linda P B
Author_Institution :
Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA
Abstract :
This paper presents design, fabrication, and optimization of high quality factor (Q) inductors on low dielectric polymers implemented on a high resistivity silicon substrate. Both Benzocyclobutene (BCB) and SU-8™ dielectrics were used as low dielectric material. A maximum Q > 20 at 8GHz was measured for a 2.5nH inductor on SU8™ deposited on high resistivity Si.
Keywords :
MMIC; Q-factor; dielectric losses; dielectric thin films; inductors; 8 GHz; RFIC inductors; SU-8 dielectrics; benzocyclobutene dielectrics; design; dielectric loss; fabrication; high quality factor inductors; high resistivity silicon substrate; low-k dielectrics effect; optimization; self resonant frequency; spiral inductors; Conductivity; Design optimization; Dielectric materials; Dielectric substrates; Fabrication; Inductors; Polymers; Q factor; Radiofrequency integrated circuits; Silicon;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262216
