Title :
Refined wide band modelling and design of CMOS-compatible spiral inductors with BCB dielectric layer
Author :
Tikhov, Yuri ; Shim, Dongha ; Nam, K.W. ; Song, Insang
Author_Institution :
Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
This paper discloses a new measurement-based model of on-chip spiral inductor with BCB dielectric layer. The parameters of the refined equivalent circuit are extracted through an optimisation with respect to specially formulated objective functions. Accurate modelling of fabricated high-Q inductors validates the proposed approach over a wide band from 100 MHz to 20 GHz.
Keywords :
CMOS integrated circuits; Q-factor; equivalent circuits; polymer films; thin film inductors; 100 MHz to 20 GHz; BCB dielectric layer; CMOS-compatible spiral inductors; benzocyclobutene; high-Q inductors; on-chip spiral inductor; Dielectric measurements; Dielectric substrates; Equivalent circuits; Fabrication; Frequency; Inductors; Integrated circuit modeling; Silicon; Spirals; Wideband;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262217
